Introduction to Microlithography, Copyright, ACS Symposium Series

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Downloaded by 80.82.77.83 on January 4, 2018 | http://pubs.acs.org Publication Date: May 3, 1983 | doi: 10.1021/bk-1983-0219.fw001

Introduction to Microlithography

Thompson et al.; Introduction to Microlithography ACS Symposium Series; American Chemical Society: Washington, DC, 1983.

Thompson et al.; Introduction to Microlithography ACS Symposium Series; American Chemical Society: Washington, DC, 1983.

Downloaded by 80.82.77.83 on January 4, 2018 | http://pubs.acs.org Publication Date: May 3, 1983 | doi: 10.1021/bk-1983-0219.fw001

Introduction to Microlithography Theory, Materials, and Processing L. F. Thompson,

Downloaded by 80.82.77.83 on January 4, 2018 | http://pubs.acs.org Publication Date: May 3, 1983 | doi: 10.1021/bk-1983-0219.fw001

Bell

EDITOR

Laboratories

C. G. Willson,

EDITOR

IBM Research

Laboratory

M. J. Bowden, E D I T O R

Bell Laboratories

Based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, M a r c h 2 0 - 2 5 , 1983

ACS SYMPOSIUM SERIES

AMERICAN

CHEMICAL

WASHINGTON,

D.

219

SOCIETY C.

1983

Thompson et al.; Introduction to Microlithography ACS Symposium Series; American Chemical Society: Washington, DC, 1983.

Downloaded by 80.82.77.83 on January 4, 2018 | http://pubs.acs.org Publication Date: May 3, 1983 | doi: 10.1021/bk-1983-0219.fw001

Library of Congress Cataloging in Publication Data Introduction to microlithography. (ACS symposium series, ISSN 0097-6156; 219) Includes bibliographies and index. Contents: An introduction to lithography/L. F. Thompson—The lithographic process—the physics/ L. F. Thompson and M. J. Bowden—Organic resist materials—theory and chemistry/C. Grant Willson— [etc.] 1. Photolithography—Congresses. 2. Photoresists— Congresses. I. Thompson, Larry F., 1944. II. Willson, C. Grant, 1939. III. Bowden, Murrae J. S., 1943. IV. American Chemical Society. Division of Organic Coatings and Plastics Chemistry. V. American Chemical Society. National Meeting (185th: 1983: Seattle, Wash.) VI. Series. TR940.I57 1983 686.2'315 83-5968 ISBN 0-8412-0775-5

Copyright © 1983 American Chemical Society All Rights Reserved. The appearance of the code at the bottom of thefirstpage of each article in this volume indicates the copyright owner's consent that reprographic copies of the article may be made for personal or internal use or for the personal or internal use of specific clients. This consent is given on the condition, however, that the copier pay the stated per copy fee through the Copyright Clearance Center, Inc. for copying beyond that permitted by Sections 107 or 108 of the U.S. Copyright Law. This consent does not extend to copying or transmission by any means—graphic or electronic—for any other purpose, such as for general distribution, for advertising or promotional purposes, for creating new collective work, for resale, or for information storage and retrieval systems. The copying fee for each chapter is indicated in the code at the bottom of thefirstpage of the chapter. The citation of trade names and/or names of manufacturers in this publication is not to be construed as an endorsement or as approval by ACS of the commercial products or services referenced herein; nor should the mere reference herein to any drawing, specification, chemical process, or other data be regarded as a license or as a conveyance of any right or permission, to the holder, reader, or any other person or corporation, to manufacture, reproduce, use, or sell any patented invention or copyrighted work that may in any way be related thereto. PRINTED IN THE UNITED STATES OF AMERICA.

Thompson et al.; Introduction to Microlithography ACS Symposium Series; American Chemical Society: Washington, DC, 1983.

Downloaded by 80.82.77.83 on January 4, 2018 | http://pubs.acs.org Publication Date: May 3, 1983 | doi: 10.1021/bk-1983-0219.fw001

ACS Symposium Series M. Joan Comstock, Series Editor

Advisory Board David L. Allara

Robert Ory

Robert Baker

Geoffrey D. Parfitt

Donald D. Dollberg

Theodore Provder

Brian M . Harney

Charles N. Satterfield

W. Jeffrey Howe

Dennis Schuetzle

Herbert D. Kaesz

Davis L. Temple, Jr.

Marvin Margoshes

Charles S. Tuesday

Donald E. Moreland

C. Grant Willson

Thompson et al.; Introduction to Microlithography ACS Symposium Series; American Chemical Society: Washington, DC, 1983.

Downloaded by 80.82.77.83 on January 4, 2018 | http://pubs.acs.org Publication Date: May 3, 1983 | doi: 10.1021/bk-1983-0219.fw001

FOREWORD The A C S

SYMPOSIUM

SERIES

w a s f o u n d e d i n 1974 to p r o v i d e

a m e d i u m for p u b l i s h i n g symposia q u i c k l y i n book form. T h e f o r m a t of the Series p a r a l l e l s t h a t o f the c o n t i n u i n g IN

CHEMISTRY

SERBES

ADVANCES

except that i n o r d e r to save t i m e the

p a p e r s are not typeset b u t are r e p r o d u c e d as t h e y are subm i t t e d b y the authors i n c a m e r a - r e a d y f o r m . P a p e r s are rev i e w e d u n d e r the s u p e r v i s i o n o f the E d i t o r s w i t h t h e assistance o f the Series A d v i s o r y B o a r d a n d are selected to m a i n t a i n the i n t e g r i t y of the s y m p o s i a ; h o w e v e r , v e r b a t i m r e p r o d u c t i o n s of p r e v i o u s l y p u b l i s h e d p a p e r s are n o t a c c e p t e d .

B o t h reviews

a n d reports o f r e s e a r c h are a c c e p t a b l e s i n c e s y m p o s i a m a y e m b r a c e b o t h types of presentation.

Thompson et al.; Introduction to Microlithography ACS Symposium Series; American Chemical Society: Washington, DC, 1983.