Microelectronics Technology - ACS Publications - American Chemical


Microelectronics Technology - ACS Publications - American Chemical...

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ACS

SYMPOSIUM

SERIES

614

Microelectronics Technology

Downloaded by 80.82.78.170 on December 10, 2016 | http://pubs.acs.org Publication Date: May 5, 1995 | doi: 10.1021/bk-1995-0614.fw001

Polymers for Advanced Imaging and Packaging Elsa Reichmanis, EDITOR AT&T Bell Laboratories

Christopher K. Ober, EDITOR Cornell University

Scott A. MacDonald, EDITOR IBM Almaden Research Center

Takao Iwayanagi, EDITOR Hitachi Research Laboratory

Tadatomi Nishikubo, EDITOR Kanagawa University Developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995

American Chemical Society, Washington, D C 1995

Reichmanis et al.; Microelectronics Technology ACS Symposium Series; American Chemical Society: Washington, DC, 1995.

TK 7874 .Μ475 1995 Copy 1

M i c r o e l e c t r o n i c s technology

Library of Congress Cataloging-in-Publication Data Microelectronics technology: polymers for advanced imaging and packaging: developedfroma symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995 / Elsa Reichmanis... [et al.], editor. Downloaded by 80.82.78.170 on December 10, 2016 | http://pubs.acs.org Publication Date: May 5, 1995 | doi: 10.1021/bk-1995-0614.fw001

p.

cm.—(ACS symposium series; 614)

Includes bibliographical references and index. ISBN 0-8412-3332-2 1. Microelectronic packaging—Materials—Congresses. 2. Polymers—Congresses. 3. Photoresists—Congresses. I. Reichmanis, Elsa, 1953- . II. American Chemical Society. Division of Polymeric Materials: Science and Engineering, Inc. III. Kobunshi Gakkai (Japan). Polymers for Microelectronics Division. IV. American Chemical Society. Meeting (209th: 1995: Anaheim, Calif.) V. Series. TK7874.M475 1995 621.381'046—dc20

95-44669 CIP

This book is printed on acid-free, recycled paper. Copyright © 1995 American Chemical Society All Rights Reserved. The appearance of the code at the bottom of the first page of each chapter in this volume indicates the copyright owner's consent that reprographic copies of the chapter may be made for personal or internal use or for the personal or internal use of specific clients. This consent is given on the condition, however, that the copier pay the stated per-copy fee through the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923, for copying beyond that permitted by Sections 107 or 108 of the U.S. Copyright Law. This consent does not extend to copying or transmission by any means—graphic or electronic—for any other purpose, such as for general distribution, for advertising or promotional purposes, for creating a new collective work, for resale, or for information storage and retrieval systems. The copying fee for each chapter is indicated in the code at the bottom of the first page of the chapter. The citation of trade names and/or names of manufacturers in this publication is not to be construed as an endorsement or as approval by ACS of the commercial products or services referenced herein; nor should the mere reference herein to any drawing, specification, chemical process, or other data be regarded as a license or as a conveyance of anyrightor permission to the holder, reader, or any other person or corporation, to manufacture, reproduce, use, or sell any patented invention or copyrighted work that may in any way be related thereto. Registered names, trademarks, etc., used in this publication, even without specific indication thereof, are not to beconsideredunprotectedbylaw. PRINTED IN THE UNITED STATES OF AMERICA

Reichmanis et al.; Microelectronics Technology ACS Symposium Series; American Chemical Society: Washington, DC, 1995.

1995 Advisory Board ACS Symposium Series Robert J. Alaimo

Cynthia A. Maryanoff

Procter & Gamble Pharmaceuticals

R. W. Johnson Pharmaceutical Research Institute

Downloaded by 80.82.78.170 on December 10, 2016 | http://pubs.acs.org Publication Date: May 5, 1995 | doi: 10.1021/bk-1995-0614.fw001

Mark Arnold University of Iowa

Roger A. Minear

David Baker

University of Illinois at Urbana-Champaign

University of Tennessee

Omkaram Nalamasu Arindam Bose

AT&T Bell Laboratories

Pfizer Central Research

Vincent Pecoraro Robert F. Brady, Jr.

University of Michigan

Naval Research Laboratory

George W. Roberts Mary E. Castellion

North Carolina State University

ChemEdit Company

John R. Shapley Margaret A. Cavanaugh National Science Foundation

University of Illinois at Urbana-Champaign

Arthur B. Ellis

Douglas A. Smith

University of Wisconsin at Madison

Concurrent Technologies Corporation

Gunda I. Georg

L. Somasundaram

University of Kansas

DuPont

Madeleine M. Joullie

Michael D. Taylor

University of Pennsylvania

Parke-Davis Pharmaceutical Research

Lawrence P. Klemann

William C. Walker

Nabisco Foods Group

DuPont

Douglas R. Lloyd

Peter Willett

The University of Texas at Austin

University of Sheffield (England)

Reichmanis et al.; Microelectronics Technology ACS Symposium Series; American Chemical Society: Washington, DC, 1995.

Downloaded by 80.82.78.170 on December 10, 2016 | http://pubs.acs.org Publication Date: May 5, 1995 | doi: 10.1021/bk-1995-0614.fw001

Foreword I H E ACS SYMPOSIUM SERIES was first published in 1974 to provide a mechanism for publishing symposia quickly in book form. The purpose of this series is to publish comprehensive books developed from symposia, which are usually "snapshots in time" of the current research being done on a topic, plus some review material on the topic. For this reason, it is necessary that the papers be published as quickly as possible. Before a symposium-based book is put under contract, the proposed table of contents is reviewed for appropriateness to the topic and for comprehensiveness of the collection. Some papers are excluded at this point, and others are added to round out the scope of the volume. In addition, a draft of each paper is peer-reviewed prior to final acceptance or rejection. This anonymous review process is supervised by the organizer^) of the symposium, who become the editor(s) of the book. The authors then revise their papers according to the recommendations of both the reviewers and the editors, prepare camera-ready copy, and submit the final papers to the editors, who check that all necessary revisions have been made. As a rule, only original research papers and original review papers are included in the volumes. Verbatim reproductions of previously published papers are not accepted.

Reichmanis et al.; Microelectronics Technology ACS Symposium Series; American Chemical Society: Washington, DC, 1995.